High Performance Micro Resonators-Based Sensors Using Multimode Excitation

We present a multi-mode excitation technique to significantly amplify the amplitude signal of micro-resonators-based sensors operating at their higher-order modes. show that can reduce noise effects, elevate dynamic response level, and total response. demonstrate efficiency enhance performance gas sensor using electrothermally heated doubly-clamped buckled beams. The results indicate clear amplification for 2nd mode while detecting Helium compared single-source excitation. A 24-times magnification is achieved. demonstrated approach provides promising path efficiently exploit modes resonant leading improved accuracy resolution.